✦ LIBER ✦
Elastic recoil detection using time-of-flight for analysis of TiN/AlSiCu/TiN/Ti contact metallization structures
✍ Scribed by S.C. Gujrathi; G. Gagnon; V. Fortin; M. Caron; J.F. Currie; L. Ouellet; Y. Tremblay
- Book ID
- 114169809
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 679 KB
- Volume
- 136-138
- Category
- Article
- ISSN
- 0168-583X
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