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Elastic, mechanical, and thermal properties of nanocrystalline diamond films

✍ Scribed by Philip, J.; Hess, P.; Feygelson, T.; Butler, J. E.; Chattopadhyay, S.; Chen, K. H.; Chen, L. C.


Book ID
120655206
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
995 KB
Volume
93
Category
Article
ISSN
0021-8979

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## Abstract The aim of this paper is to summarise recent progress in the growth of small grain‐sized Chemical Vapor Deposition (CVD) diamond often called nanocrystalline diamond, i.e., diamond with grains typically smaller than 500 nm. Nanocrystalline (NCD) and Ultrananocrystalline diamond (UNCD) f