Efficient simulation of impurity redistribution in VLSI fabrication processes : S. Mijalkovic and N. Stojadinovic. Solid-State Elect. 31(12), 1689 (1988)

• Book ID: 103282182
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 142 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90039-p