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Efficient performance of neural networks for nonlinearity error modeling of three-longitudinal-mode interferometer in nano-metrology system

✍ Scribed by Saeed Olyaee; Samaneh Hamedi; Zahra Dashtban


Book ID
113861485
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
932 KB
Volume
36
Category
Article
ISSN
0141-6359

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