✦ LIBER ✦
Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films
✍ Scribed by Chang, Yia-Chung; Li, Guangwei; Chu, Hanyou; Opsal, Jon
- Book ID
- 115390481
- Publisher
- Optical Society of America
- Year
- 2006
- Tongue
- English
- Weight
- 171 KB
- Volume
- 23
- Category
- Article
- ISSN
- 1084-7529
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