Efficient and accurate optical scatterometry diagnosis of grating variation based on segmented moment matching and singular value decomposition method

✍ Scribed by Jui-Hsiang Liu; Chi-Wei Liu; Kuan-Ju Huang; Tsung-Yu Li; Meng-Chun Chiu; Jeng-Jei Hong; Charlie Chung-Ping Chen; Chih-Sheng Jao; Lon Wang

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 631 KB
• Volume: 86
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.01.031