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Efficiency enhancement of diffractive optical elements by variable relief profiling

โœ Scribed by A. Stemmer; H. Zarschizky; E. Knapek; G. Lefranc; F. Mayerhofer

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
670 KB
Volume
27
Category
Article
ISSN
0167-9317

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Microfabrication of diffractive optical
Microfabrication of diffractive optical element with continuous relief by focused ion beam
โœ Yongqi Fu; Ngoi Kok Ann Bryan; Ong Nan Shing ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 713 KB

The diffractive optical element (DOES) with continuous relief and submicron feature size is very useful for optical fibre communication due to its perfect coupling. Microfabrication of the DOES by focused ion beam (FIB) technology is introduced in detail in this paper. Based on analyzing influencing