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Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements

✍ Scribed by Goray, Leonid I. ;Seely, John F.


Book ID
115349843
Publisher
The Optical Society
Year
2002
Tongue
English
Weight
230 KB
Volume
41
Category
Article
ISSN
1559-128X

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