Effects of ZnAl2O4 segregation in high temperature sintered Al-doped ZnO sputtering target on optical and electrical properties of deposited thin films

✍ Scribed by Wei, Tiefeng; Zhang, Yulong; Yang, Ye; Tan, Ruiqin; Cui, Ping; Song, Weijie

• Book ID: 120651808
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 945 KB
• Volume: 221
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2013.01.049