Effects of ultraviolet irradiation treatment on low-kSiOC(−H) ultra-thin films deposited by using TMS/O2PEALD

✍ Scribed by Chang Young Kim; Jong-Kwan Woo; Chi Kyu Choi; R. Navamathavan

• Book ID: 119936907
• Publisher: The Korean Physical Society
• Year: 2012
• Tongue: English
• Weight: 374 KB
• Volume: 60
• Category: Article
• ISSN: 0374-4884
• DOI: 10.3938/jkps.60.800