✦ LIBER ✦
Effects of titanium liners prepared by ionized physical vapor deposition on source/drain series resistance
✍ Scribed by Yong Ju Lee
- Book ID
- 108287777
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 154 KB
- Volume
- 483
- Category
- Article
- ISSN
- 0040-6090
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