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Effects of the modified materials on plasma in surface modification by plasma

✍ Scribed by Katoh, Masaaki; Miyazaki, Hirokatu; Miyashita, Kiyoshi; Ohi, Seiya; Tajima, Kenichi; Ohte, Takeo; Kojima, Akira; Ohtani, Sugio

Book ID
108416330
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
178 KB
Volume
169-170
Category
Article
ISSN
0169-4332

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