Effect of deposition power on structural
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Beom-Ki Shin; Tae-Il Lee; Jyoti Prakash Kar; Min-Jung Lee; Kang-Il Park; Kyung-J
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Article
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2011
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Elsevier Science
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English
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The change of stoichiometric ratio caused by the increase in sputtering power in Al-doped ZnO (AZO) films was investigated, where the films were grown by pulsed dc magnetron sputtering with a cylindrical target. The properties of the films were strongly affected by the sputtering power. Lower sputte