✦ LIBER ✦
Effects of target bias voltage on the electrical conductivity of DLC films deposited by PBII/D with a bipolar pulse
✍ Scribed by S. Miyagawa; S. Nakao; J. Choi; M. Ikeyama; Y. Miyagawa
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 198 KB
- Volume
- 242
- Category
- Article
- ISSN
- 0168-583X
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