Effects of susceptor rotation speed and total flow rate on selectivity in metalorganic chemical vapor deposition growth techniques

✍ Scribed by Takashi Kobayashi; Minoru Ida; Kenji Kurishima

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 284 KB
• Volume: 140
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)90321-2