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Effects of surface plasma treatments in relation to electrical isolation in GaAs integrated circuits

โœ Scribed by J. Gual; R. Dkiouak; J. Samitier; J.R. Morante; A. Cornet; P. Boher; M. Renaud

Book ID
104197720
Publisher
Elsevier Science
Year
1991
Weight
60 KB
Volume
251-252
Category
Article
ISSN
0167-2584

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