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Effects of surface geometry in insulating films on the accuracy of thickness measurement with a contact instrument

✍ Scribed by A. I. Sergeeva; Ya. M. Tseitlin

Publisher: Springer US
Year: 1985
Tongue: English
Weight: 266 KB
Volume: 28
Category: Article
ISSN: 0543-1972
DOI: 10.1007/bf00868782

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