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Effects of substrate temperature on the efficiency of hydrogen incorporation on the properties of Al-doped ZnO films

✍ Scribed by H.B. Zhou; H.Y. Zhang; M.L. Tan; Z.G. Wang


Book ID
113915355
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
925 KB
Volume
51
Category
Article
ISSN
0749-6036

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## Abstract Heavily‐doped ZnO:Al films have been deposited on high temperature stable glass substrates using radio‐frequency (RF) magnetron sputtering. The effect of growth temperature on physical properties of the films has been investigated. The microstructure evolved a columnar structure into a