Sterilization is required for using any device in contact with the human body. Numerous authors have studied device properties after sterilization and reported on bulk and surface modifications of many materials after processing. These surface modifications may in turn influence device biocompatibility. Still, data are missing on the effect of sterilization procedures on new biomaterials such as nickeltitanium (NiTi). Herein we report on the effect of dry heat, steam autoclaving, ethylene oxide, peracetic acid, and plasma-based sterilization techniques on the surface properties of NiTi. After processing electropolished NiTi disks with these techniques, surface analyses were performed by Auger electron spectroscopy (AES), atomic force microscopy (AFM), and contact angle measurements. AES analyses revealed a higher Ni concentration (6-7 vs. 1%) and a slightly thicker oxide layer on the surface for heat and ethylene oxide processed materials. Studies of surface topography by AFM showed up to a threefold increase of the surface roughness when disks were dry heat sterilized. An increase of the surface energy of up to 100% was calculated for plasma treated surfaces. Our results point out that some surface modifications are induced by sterilization procedures. Further work is required to assess the effect of these modifications on biocompatibility, and to determine the most appropriate methods to sterilize NiTi.