✦ LIBER ✦
Effects of slurry components on the surface characteristics when chemical mechanical polishing NiP/Al substrate
✍ Scribed by Shih-Chieh Lin; Huang-Chieh Huang; Hong Hocheng
- Book ID
- 108287773
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 206 KB
- Volume
- 483
- Category
- Article
- ISSN
- 0040-6090
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