✦ LIBER ✦
Effects of silyl concentration, hydrogen concentration, ion flux, and silyl surface diffusion length on microcrystalline silicon film growth
✍ Scribed by Shutang Wen; Liwei Zhang; Jingxiao Lu; Yuxiao Li; Zhiyong Du
- Book ID
- 107514071
- Publisher
- Springer US
- Year
- 2008
- Tongue
- English
- Weight
- 407 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0256-1115
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