✦ LIBER ✦
Effects of Sb doping on Si(001) surface roughening and epitaxial thickness at low growth temperatures (100â300â°C)
✍ Scribed by Lee, N.-E.; Greene, J. E.
- Book ID
- 120048601
- Publisher
- American Institute of Physics
- Year
- 1995
- Tongue
- English
- Weight
- 358 KB
- Volume
- 67
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.114607
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