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Effects of rapid thermal treatments on the electrical properties of thin SiO2 gate oxide for DRAM p-channel MOS transistors

✍ Scribed by S Santucci; S Guerrieri; M Passacantando; P Picozzi; F Famà; N Nardi; F Basile


Book ID
117144752
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
265 KB
Volume
280
Category
Article
ISSN
0022-3093

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