Effects of pupil discretization and Littrow illumination in the simulation of bright-field defect detection

✍ Scribed by Rafler, Stephan; Petschow, Matthias; Seifert, Uwe; Frenner, Karsten; Göckeritz, Jens; Osten, Wolfgang

• Book ID: 115431966
• Publisher: Optical Society of America
• Year: 2009
• Tongue: English
• Weight: 222 KB
• Volume: 34
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.34.001840