## Abstract Polycrystalline undoped ZnO thin films were deposited on glass substrates by atomic layer deposition (ALD). Effects of surface pretreatments prior to the ALD growth have been investigated. In the relationship between grown film thickness and number of ALD cycles, an incubation period in
โฆ LIBER โฆ
Effects of pretreatment of substrates on the preparation of large scale ZnO nanotube arrays
โ Scribed by Xiao Guo; Min Guo; Mei Zhang; Xidong Wang; Kuo-Chih Chou
- Publisher
- Nonferrous Metals Society of China
- Year
- 2010
- Tongue
- English
- Weight
- 994 KB
- Volume
- 29
- Category
- Article
- ISSN
- 1001-0521
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