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Effects of post-annealing on the dielectric properties of Au/BaTiO3/Pt thin film capacitors

โœ Scribed by E.J.H. Lee; F.M. Pontes; E.R Leite; E. Longo; R. Magnani; P.S. Pizani; J.A. Varela


Book ID
116730237
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
387 KB
Volume
58
Category
Article
ISSN
0167-577X

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Thin film capacitors with BaTiO 3 as dielectric and RuO 2 as electrode material have been prepared by rf-magnetron sputtering at temperatures up to 750 1C and under various oxygen partial pressures. They have been analyzed by complex impedance spectroscopy in the temperature range 20-200 1C. At abou