✦ LIBER ✦
Effects of plasma etching chemistry and post-processing on the mechanical adhesion and electrical contact of double polysilicon layer structures
✍ Scribed by Yuan Xiong Li; French, P.J.; Wolffenbuttel, R.F.
- Book ID
- 114536011
- Publisher
- IEEE
- Year
- 1995
- Tongue
- English
- Weight
- 687 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0018-9383
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