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Effects of phase changes on reflection and their wavelength dependence in optical profilometry

✍ Scribed by Doi, Takuma ;Toyoda, Kouji ;Tanimura, Yoshihisa

Book ID: 115346454
Publisher: The Optical Society
Year: 1997
Tongue: English
Weight: 465 KB
Volume: 36
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.36.007157

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