✦ LIBER ✦
Effects of oxygen in silicon on device processing : T. M. Brown. Semiconductor int., 223 (May 1987)
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 122 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0026-2714
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