✦ LIBER ✦
Effects of O2 and SF6 on the anisotropic etching of polysilicon : Minh Nguyen. Semiconductor int., 110 (May 1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 132 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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