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Effects of nitrogen deficiency on electronic properties of AlGaN surfaces subjected to thermal and plasma processes

✍ Scribed by Tamotsu Hashizume; Hideki Hasegawa

Book ID: 103816069
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 398 KB
Volume: 234
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2004.05.091

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