Effects of neutral gas incorporation in molybdenum coatings produced by magnetron sputtering

✍ Scribed by P. Bosland; J. Danroc; R. Gillet; L. Lombard

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 450 KB
• Volume: 166
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90392-6