✦ LIBER ✦
Effects of line and passivation geometry on curvature evolution during processing and thermal cycling in copper interconnect lines
✍ Scribed by T.-S Park; S Suresh
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 813 KB
- Volume
- 48
- Category
- Article
- ISSN
- 1359-6454
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