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Effects of Limiting Orifice (Anode) Geometries on Charged Particle Characteristics in an Analytical Radiofrequency Glow Discharge as Determined by Langmuir, Current and Voltage Probes

✍ Scribed by YE, YUANCAI; MARCUS, R. KENNETH


Book ID
120053638
Publisher
Royal Society of Chemistry
Year
1997
Tongue
English
Weight
470 KB
Volume
12
Category
Article
ISSN
0267-9477

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