✦ LIBER ✦
Effects of irradiation time and subsequent heat treatment on Nd:YAG laser annealing of high-dose As-implanted silicon
✍ Scribed by Ohmura, Y. ;Shigematsu, T. ;Nakayama, R.
- Publisher
- John Wiley and Sons
- Year
- 1979
- Tongue
- English
- Weight
- 405 KB
- Volume
- 56
- Category
- Article
- ISSN
- 0031-8965
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