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Effects of Hydrogen and Temperature on the Kinetics of the Fluidized-Bed Nitridation of Silicon

✍ Scribed by Zoran Jovanovic; Shoichi Kimura; Octave Levenspiel

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ W. Luty 📂 Article 📅 1983 🏛 Springer-Verlag ⚖ 442 KB

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✍ Sánchez-Prieto, J.; Soria-Verdugo, A.; Briongos, J.V.; Santana, D. 📂 Article 📅 2014 🏛 Elsevier Science 🌐 English ⚖ 510 KB