The effect of ITO films thickness on the
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Hsin Her Yu; Shug-June Hwang; Ming-Chun Tseng; Chien-Chang Tseng
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Article
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2006
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Elsevier Science
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English
โ 296 KB
Indium tin oxide (ITO) thin films were deposited on cyclic olefin copolymer substrate at room temperature by an inverse target sputtering system. The crystal structure and the surface morphology of the deposited ITO films were examined by X-ray diffraction and atomic force microscopy, separately. Th