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Effects of helium addition to an argon glow discharge plasma on emission lines of sputtered particles

✍ Scribed by Wagatsuma, Kazuaki.; Hirokawa, Kichinosuke.

Book ID: 126913059
Publisher: American Chemical Society
Year: 1988
Tongue: English
Weight: 460 KB
Volume: 60
Category: Article
ISSN: 0003-2700
DOI: 10.1021/ac00158a022

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