Effects of growth interruption and FIB implantation in the UHV total vacuum process for the buried mesoscopic structures

✍ Scribed by F. Wakaya; T. Matsubara; H. Nakayama; J. Yanagisawa; Y. Yuba; S. Takaoka; K. Murase; K. Gamo

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 192 KB
• Volume: 227
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(96)00417-6