Effects of Grain Orientation on Preferred Abnormal Grain Growth in Copper Films on Silicon Substrates
β Scribed by Jianmin Zhang; Kewei Xu; Jiawen He
- Book ID
- 110239758
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 71 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0261-8028
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π SIMILAR VOLUMES
In this paper, the effects of grain orientation on preferred abnormal grain growth in HCP-polycrystalline thin films have been analysed with respect to strain energy. The calculated results showed that C,a~, the average values of the orientation factor, decreased with increase of 1 for the same h an
## Abstract A phase field model of grain growth in thin films on rigid substrates is presented, in which the motion of grain boundaries is driven by curvatures as well as anisotropy in surface, interface, and strain energies. The match between the proposed model and the corresponding sharp interfac