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Effects of GaAs substrate misorientation on strain relaxation in In[sub x]Ga[sub 1âx]As films and multilayers

✍ Scribed by Goldman, R. S.; Kavanagh, K. L.; Wieder, H. H.; Ehrlich, S. N.; Feenstra, R. M.

Book ID: 120336624
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 734 KB
Volume: 83
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.367331

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Effects of GaAs substrate misorientation on strain relaxation in In[sub x]Ga[sub 1âx]As films and multilayers

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