Effects of focused ion beam milling on t
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S. Shim; H. Bei; M.K. Miller; G.M. Pharr; E.P. George
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Article
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2009
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Elsevier Science
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English
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Focused ion beam (FIB) milling is the typical method used to fabricate micropillars to study small-scale plasticity and size effects in uniaxial compression. However, FIB milling can introduce defects into the milled pillars. To investigate the effects of FIB damage on mechanical behavior, we tested