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Effects of focus change on the fabrication of tungsten nanowire by electron-beam-induced deposition

✍ Scribed by Liu, Zhi-Quan; Mitsuishi, Kazutaka; Furuya, Kazuo

Book ID
125832533
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
285 KB
Volume
15
Category
Article
ISSN
0957-4484

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## Abstract Metal nanowires are one of the potential candidates for nanostructured sensing elements used in future portable devices for chemical detection; however, the optimal methods for fabrication have yet to be fully explored. Two routes to nanowire fabrication, electron‐beam lithography (EBL)