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Effects of fluorine implantation into a-C:H thin films

โœ Scribed by Wong, S.P.; Peng, Shaoqi; Ke, Ning; Li, Pengxu


Book ID
122866993
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
339 KB
Volume
2
Category
Article
ISSN
0925-9635

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