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Effects of film thickness and grain size on the electrical properties of Pb(Zr,Ti)O 3 thin films prepared by MOCVD

โœ Scribed by Shimizu, Masaru; Nakashima, Seiji; Kaibara, Kazuyuki; Fujisawa, Hironori; Niu, Hirohiko

Book ID
120427523
Publisher
Taylor and Francis Group
Year
2000
Tongue
English
Weight
369 KB
Volume
241
Category
Article
ISSN
0015-0193

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โœ Hyun-Suk Hwang; Young Park; Won Seok Choi ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 319 KB

Pb(Zr,Ti)O 3 thin films were successfully prepared on a Pt bottom electrode with indium tin oxide coated glass substrates using RF magnetron sputtering. Use of the indium tin oxide coated glass substrate reduced the fatigue characteristics and provided for excellent crystallization of the Pb(Zr,Ti)O