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Effects of F- ions and F2 molecules on the oscillation process of a discharge-pumped ArF excimer laser

✍ Scribed by Nagai, S.; Sakai, M.; Furuhashi, H.; Kono, A.; Goto, T.; Uchida, Y.

Book ID: 117868826
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 152 KB
Volume: 34
Category: Article
ISSN: 0018-9197
DOI: 10.1109/3.655005

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