✦ LIBER ✦
Effects of experimental parameters on NF3 decomposition fraction in an oxygen-based RF plasma environment
✍ Scribed by Ya-Fen Wang; Lin-Chi Wang; MinLiang Shih; Cheng-Hsien Tsai
- Book ID
- 116356930
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 314 KB
- Volume
- 57
- Category
- Article
- ISSN
- 0045-6535
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