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Effects of equal biaxial stretching on the electric properties of polyimide films

✍ Scribed by Mao Xu; Wei Zhu; Xian Zhang; Shangqu Liu; Shuquan Liu

Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
255 KB
Volume
27
Category
Article
ISSN
0032-3861

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The effect of different annealing methods on the sheet resistance of indium tin oxide (ITO) on polyimide (PI) substrate has been investigated. ITO thin films were prepared by RF magnetron sputtering in pure Ar gas and electro-annealing, this was carried out in the flow of an electric current at seve