✦ LIBER ✦
Effects of deposition temperatures on Ta thin film resistors reactively sputtered in oxygen: W R Hardy and D Mills,J Vac Sci Technol, Jan/Feb 1973, 303–306
- Publisher
- Elsevier Science
- Year
- 1973
- Tongue
- English
- Weight
- 320 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0042-207X
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