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Effects of deposition condition on the ionic conductivity and structure of amorphous lithium phosphorus oxynitrate thin film

โœ Scribed by Nam-Seok Roh; Sang-Dong Lee; Hyuk-Sang Kwon

Book ID
114389021
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
205 KB
Volume
42
Category
Article
ISSN
1359-6462

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Thin films of lithium phosphorus oxynitride (Lipon) have been grown using a plasma-assisted, directed vapor deposition (PA-DVD) technique. In this approach, a high voltage electron beam is used to vaporize a Li 3 PO 4 source and a supersonic, nitrogen-doped, helium gas jet then transport the vapor t